박막두께측정기 > Option Function박막두께측정기 > Option Function

Posted at 2012/02/23 14:42 | Posted in 설비/장비 정보
  박막두께측정기 > Option Function

박막두께측정기 > Option Function

 


1. General Specification
Principle Sub pixel Edge Detect Algorism
Auto Focus Method Region Define Image Contrast Method
CCD Camera High Speed 640*480pixels, 256gray level, 200 fps
Light source Tungsten-Halogen 100W (White)
Measurement width range 0.8 ~ 80μm at 50x
4 ~ 400μm at 10x
8 ~ 800μm at 5x
2. System explanation
  - Detected position teaching for optical system
  - Fully automatic & Semi-automatic CD measurement
3. S/W UI

1. General Specification
Principle White-light Scanning interferometer
Measuring Range Lateral Resolution: 0.7㎛
Vertical Resolution: 0.0001㎛
2. Structure of Optic Part

1. General Specification
Principle Ohm's Law
Measuring Range 1mΩ ~ 10MΩ (Normal)
10MΩ ~ 1GΩ (High)
2. Principle Image

1. General Specification
Measurement Method Normal Drop-Shape Analyzing Method
(Young-Laplace,Trigonometric Method)
Drop Control Automatic Pump by Computer Control
Angle Range Automatic Pump by Computer Control
Resolution ±2°
2. Principle Image

1. General Specification
Usable Wavelength 420nm ~ 780nm (Option. 300nm ~ 1100nm)
Wavelength Resolution 1.7nm
Repeatability ± 0.3% at 550nm
2. Principle

1. General Specification
Temperature Room Temperature
Measurement Range 10Mpa ~ 3000Mpa
2. Advantage
  - Non Contact Method
  - Fast Scan Speed
  - Stable reflection signal
3. Principle
박막두께측정기 > Option Function

 

[출처 : 케이맥 ] 박막두께측정기 > Option Function

PARTS > 설비장비 > 계측기 > 두께 측정기


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